基于双干涉定量相位成像的晶圆表面缺陷检测方法
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作者单位:

1.湖北工业大学 现代制造质量工程湖北省重点实验室;2.海军工程大学 船舶与海洋工程学院

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中图分类号:

O436.1

基金项目:

国家自然科学基金项目(面上项目,重点项目,重大项目)


Wafer surface defect detection method based on double interference quantitative phase imaging
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Affiliation:

1.Key Lab of Modern Manufacture Quality Engineering,Hubei University of Technology,Wuhan;2.College of Naval Architecture and Ocean Engineering,Naval University of Engineering,Wuhan

Fund Project:

The National Natural Science Foundation of China (General Program, Key Program, Major Research Plan)

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    摘要:

    针对晶圆表面多种缺陷的快速与低成本检测需求,结合四波横向剪切与离轴干涉原理提出了一种双干涉定量相位成像方法。通过对两种干涉模式的照明和显微成像模块进行共光路设计,从而无需调整系统光路即可实现对不同缺陷的低成本成像,而且待测缺陷的形貌重建过程仅需采集两幅干涉图,兼具高稳定性与高效率。实验中,所提方法检测氮化镓(GaN)晶圆表面线型缺陷的总耗时小于2s,测得最大缺陷深度为195.4 ± 1.21 nm,相比于商用白光干涉仪测量值197 ± 1.09 nm,显著提高了测量效率而且结果保持一致;此外,对表面滑移线、划痕、颗粒和残留物缺陷的提取尺寸均值分别为173, 109, 796和380 nm,以标称值为参考的相对误差均控制在3%以内,验证了所提方法的有效性。

    Abstract:

    Addressing the demand for rapid and cost-effective detection of diverse defects on wafer surfaces, this paper presents a dual-interference quantitative phase imaging method that integrates the principles of quadriwave lateral shearing interferometry and off-axis interferometry. A common-path design for the illumination and microscopic imaging modules of both interferometric modalities eliminates the need for optical reconfiguration, enabling low-cost imaging of various defect types. Moreover, the topography of the defects under test can be quantitatively reconstructed from only two interferograms, ensuring high system stability and detection efficiency. Experimental results demonstrated that the total time for detecting linear defects on a gallium nitride wafer surface—including both image acquisition and processing—was under 2 seconds. The extracted maximum defect depth was 195.4 ± 1.21 nm, which is consistent with the value of 197 ± 1.09 nm obtained using a commercial white-light interferometer, while the processing time was significantly reduced. Furthermore, the measured sizes for surface slip lines, scratches, particles, and residues were 173, 109, 796 and 380 nm, respectively. All relative errors, referenced to nominal values, were within 3%. These comprehensive results robustly validate the effectiveness of the proposed detection system.

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  • 收稿日期:2025-08-28
  • 最后修改日期:2025-11-07
  • 录用日期:2025-12-04
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