InGaN基蓝光探测器的ODT湿法钝化改善研究
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1.广东开放大学广东理工职业学院;2.中山大学 电子与信息工程学院 广东省化合物半导体材料与器件工程技术研究开发中心;3.中山大学

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TN929.1

基金项目:

国家自然科学基金青年项目(No.62305398)、广东省自然科学基金面上项目(No. 2024A1515012163, 2025A1515011745)、广东开放大学校级重点科研项目(No.ZD1905)


Improvement of InGaN-Based Blue Photodetectors with ODT Wet Passivation
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Affiliation:

1.The Open University of Guangdong &2.Guangdong Polytechnic Institute;3.State Key Laboratory of Optoelectronic Materials and Technologies,School of Electronics and Information Technology,Sun Yat-Sen University,Guangzhou;4.Sun Yat-Sen University

Fund Project:

The National Natural Science Foundation of China (No.62305398), Natural Science Foundation of Guangdong Province (No.2024A1515012163, 2025A1515011745), Key Research Project of Guangdong Open University (No.ZD1905)

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    摘要:

    本研究使用ODT(Octadecanethiol,十八烷基硫醇)溶液湿法钝化InGaN基金属-半导体-金属结构蓝光探测器,实现了对暗电流漏电的显著抑制和对探测响应度的大幅提高。经过ODT表面处理后,器件的暗电流在0~6 V范围内都显著降低1~2个数量级;同时在响应带边波段(440 nm)附近, ODT钝化器件光暗电流比提高1个数量级,表现出显著增强的探测灵敏度。PL(Photoluminescence,光致发光)测试表明,经ODT处理后InGaN材料带边发光峰强度增加约30%,证实了其对材料表面复合的抑制;XPS(X-ray Photoelectron Spectroscopy,X射线光电子能谱)测试结果表明ODT溶液可以有效地去除InGaN表面的氧化物和形成硫钝化,从而降低了InGaN表面施主型缺陷密度和由此导致的暗电流漏电。这一研究表明ODT溶液对于InGaN材料表面复合缺陷和漏点缺陷都有显著抑制效果,从而实现了对探测器性能的显著提高。

    Abstract:

    This study utilizes an octadecanethiol (ODT) solution-based wet passivation method for InGaN-based metal-semiconductor-metal (MSM) blue light detectors, achieving significant suppression of dark current leakage and a notable enhancement in photoresponse sensitivity. After ODT surface treatment, the dark current of the device is reduced by 1~2 orders of magnitude across the 0~6 V bias range. Meanwhile, near the response band edge (440 nm), the light-to-dark current ratio of the ODT-passivated device increases by one order of magnitude, demonstrating markedly improved detection sensitivity. Photoluminescence (PL) measurements show that the band-edge emission intensity of the InGaN material increases by approximately 30% after ODT treatment, confirming the suppression of surface recombination. X-ray photoelectron spectroscopy (XPS) results indicate that the ODT solution effectively removes surface oxides and forms a sulfur-passivated layer, thereby reducing the density of donor-like surface defects and the associated dark current leakage. This study demonstrates that ODT treatment significantly suppresses both surface recombination and leakage defects in InGaN materials, leading to substantial improvement in the overall performance of the photodetector.

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  • 收稿日期:2025-08-22
  • 最后修改日期:2025-11-16
  • 录用日期:2025-12-04
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