基于菱形高斯组合窗滤波的四波横向剪切干涉相位重建
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(1.湖北工业大学 机械工程学院,湖北 武汉 430068; 2.江汉大学 智能制造学院,湖北 武汉 430056)

作者简介:

周向东 (1985-),男,博士,讲师,主要从事光电精密测量、光学设计方面的研究 。

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基金项目:

湖北工业大学 2022 年大学生创新创业训练计划(202210500006)资助项目


Phase reconstruction of quadriwave lateral shearing interferometry based on rhombic-Gaussian combined window filtering
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(1.School of Mechanical Engineering,Hubei University of Technology, Wuhan, Hubei 430068, China;2.School of Intelligent Manufacturing, Jianghan University, Wuhan, Hubei 430056, China)

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    摘要:

    针对四波横向剪切干涉(quadriwave lateral shearing interference,QLSI)相位重建中现有常规滤波窗提取差分相位时存在易受噪声、频谱泄漏和其他级次频谱串扰影响等问题,提出了一种采用菱形高斯组合窗滤波的相位重建方法。通过由频谱面内的菱形窗和垂直于频谱面的一系列二维高斯窗组合而成的滤波窗,从QLSI干涉图中提取两正交方向的差分相位,最终由两个差分相位通过基于最小二乘的傅里叶变换法重建出待测相位。采用标准样品进行实际测量,比较了使用菱形高斯组合窗和其他四种常规滤波窗滤波对重建相位的重建相位差、均方根误差(root mean square error, RMSE)和峰谷(peak to vally,PV)误差的影响。结果表明:本文提出的方法重建相位的相位差最接近样品标称值,重建相位的RMSE误差和PV误差均取得最小值,可以有效提高相位重建质量。

    Abstract:

    A phase reconstruction method using a rhombic-Gaussian combined filtering window is proposed in order to solve the problems of susceptibility to noise,spectral leakage,and crosstalk from other order spectra in the extraction of differential phase using conventional filtering windows in quadriwave lateral shearing interference (QLSI) phase reconstruction.By combining a rhombic window on the spectrum plane with a series of two-dimensional Gaussian windows perpendicular to the spectrum plane,the differential phases in two orthogonal directions are extracted from the QLSI interferogram.Finally,the phase to be measured is reconstructed from the two differential phases by a least square based Fourier transform method.Experimental measurements are implemented under a standard sample to compare the proposed rhombic-Gaussian composite window with four conventional filtering windows on the effects of the reconstructed phase in terms of the accuracy of the phase difference,root mean square error (RMSE),and peak-to-valley (PV) error.The results demonstrate that the phase difference of the phase retrieved by the proposed method is closest to the nominal value of the sample,and the RMSE error and PV error of the reconstructed phase are both the minimum,thus effectively improving the quality of phase reconstruction.

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袁训禹,李卓骏,周向东,汪慧,王华森,连子萱.基于菱形高斯组合窗滤波的四波横向剪切干涉相位重建[J].光电子激光,2024,35(8):844~850

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  • 收稿日期:2023-08-27
  • 最后修改日期:2023-11-14
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  • 在线发布日期: 2024-07-05
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