In order to study the effects of different dispersion models on the ellipsometry spectra analysis of TiO₂ films containing pores,TiO₂ thin films are prepared by sol-gel method,and five dispersion models are used to fit the ellipsometry spectra of TiO₂ films in the wavelength range of 1.55—4 eV.The fitting results of each model are verified by the oblique reflection spectra.The results show that the selection of different dispersion models has an effect on the fitting results of film thickness and porosity,and the fitting results of refractive index dispersion are obviously affected by the dispersion model.New-Amorphous,Tauc-Lorentz and Adachi-New Forouhi models are suitable for the ellipsometry spectra fitting of sol-gel TiO₂ film on the whole test band.However,the Cauchy Absorbent and Sellmeier Absorbent models cannot get a good ellipsometric spectral fitting for the whole test band,and the applicable band is narrow.The results provide a reference for the ellipsometry spectra analysis of sol-gel TiO₂ thin films containing pores.