Thin films of ZnO doped with B doped with 0at%,0.5at%,1.0at%,2.0at%,3.0at% and 4.0at% were grown on glass and silicon substrates by sol-gel method (sol-gel).The structure,morphology and optical properties of the films were characterized by X-ray diffraction (XRD), scanning electron microscope (SEM) and ultraviolet-visible (UV-Vis) spectrophotometer.The results show that the (002) diff r action peak of ZnO crystal appears at 2θ=34.4°,which i ndicates that the sampl e has hexagonal wurtzite structure.The half-height width of the diffraction pea k of (002) decreases first and then increases,indicating that the intensity of t he diffraction peak increases first and then decreases,and proving that its gra in size increases first and then decreases.When the B content is 3.0at%,the p referred orientation growth of the sample is the most obvious along (002) direct ion,and the grain growth on the film is uniform and dense.The transmittance of B-doped zinc oxide (BZO) films in the visible region first increases and then d ecreases with the increase of B³⁺ doping,and a slight blue shift appears.When the content of B³⁺ is 3.0at%,the crystalline quality of the film is the b est,the surface is the most uniform and dense,and the transmittance reaches 90%.