基于新型非周期高对比度亚波长光栅光电探测器
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(聊城大学 物理科学与信息工程学院,山东省光通信科学与技术重点实验室,山东 聊城 252000)

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王明红(1967-),男,山东聊城,教授,主要从事高功率微 波与器件、光电器件等方面研究.

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国家自然科学基金(11375081)资助项目 (聊城大学 物理科学与信息工程学院,山东省光通信科学与技术重点实验室,山东 聊城 252000)


Based on a new type of non periodic high contrast sub wavelength grating pho
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(School of Physics Science and Information Engineering,Liaocheng University, Shandong Key Laboratory of Optical Communication Science and Technology,Liaochen g,Shandong,252000)

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    摘要:

    本文提出了一种基于新型非周期高对比度亚波长 光栅(High Contrast Subwavelength Grating,HCSG)的谐振腔 增强型(Resonant Cavity Enhanced,RCE)光电探测器(Photodetector,PD),该器件是由顶 部光栅型上反射镜、PIN光探 测结构和分布式布拉格下反射镜(Distributed Bragg Reflectors,DBR)组成。新型非周期HC SG上反射镜是由局部湿法 氧化后形成的Al2O3间隔层和非周期GaAs光栅组成,实现了850 n m波段TM模式偏振光的高反射会聚特性,反射 率达到了86.5%且在1.5 μm焦距处实现了光束 会聚。下反射镜是由周期GaAs光栅和GaAs/Al0.9Ga0.1As DBR组成, 周期GaAs光栅对入射光有偏振选择特性,对TM模式的偏振光透射率为96.1%,而对TE模式的偏振光透射率仅有 3.7%。该器件利用了传输矩阵理论方法仿真模拟了其量子效率,量子 效率达到了71.8%,半高全宽接近于0.1 nm。 有效的解决了光电探测器的高量子效率和高响应带宽相互制约的问题,为下一代光通信系统 的发展提供了良好的基础。

    Abstract:

    This paper proposes a Resonant Cavity Enhance (RCE) photodetector (PD) b ased on a novel non-periodic high-contrast subwavelength grating (HCSG).The device is made of a top grating type It consists of upper reflector,PIN light detection structure and distributed Bragg reflector (DBR) lower reflector. The upper mirror is composed of a new type of non-periodic HCSG,which is composed of an Al2O3spacer layer formed afte r partial wet oxidation and an aperiodic GaAs grating.It achieves high reflection and convergence characteristics of TM mode polarized light in the 850nm band, and the reflectivity reaches 86.5% and Beam convergence is achieved at a focal l ength of 1.5μm.The lower mirror is composed of a GaAs periodic grating and GaAs/Al0.9Ga0.1As DBR.The Ga As periodic grating has a polarization selective characteristic for incident light,the polarized light transmittance for TM mode is 96.1%,and the polarized light transmittance for TE mode is only 3.7%.The device uses the transfer matrix theo ry method to simulate its quantum efficiency,and the quantum efficiency reaches 71.8%;the Poisson equation and t he carrier transport equation theoretical method are used to simulate the response bandwidth of the device,the full width at half maximum is close to 0.1nm.It effectively solves the problem that the high quantum efficiency and high respons e bandwidth of photodetectors are mutually restricted,and provides a good foundation for the development of next-generati on optical communication systems.

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杨晓伟,王明红,范鑫烨,于传洋.基于新型非周期高对比度亚波长光栅光电探测器[J].光电子激光,2020,31(7):701~707

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  • 收稿日期:2020-06-07
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  • 在线发布日期: 2020-10-21
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