基于线阵CCD的精密尺寸测量系统
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(长春理工大学 电子信息工程学院,吉林 长春 130022)

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王彩霞(1978-) ,女,博士,副教授,主要研究方向:光电 检测与信息处理.

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高通公司产学合作协同育人项目(201602034021)资助项目 (长春理工大学 电子信息工程学院,吉林 长春 130022)


Precise dimension measurement system based on linear CCD
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(Electronics and Information Engineering School,Changchun University of Science and Technology,Changchun 130022,China)

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    摘要:

    现有尺寸测量方式精度低,测量费时费力。为了 提高尺寸测量的精度,使测量系统便携化,操作简单, 文中实现了一种基于线阵CCD的精密尺寸测量系统。文中提出新的象元细分方法,将2个像 元间距为8μm的 线阵CCD等距错排并以60°斜放,可突破像元间距对测量精度的限制, 将最大测量误差减小为2μm,在此 基础上采用浮动阈值方法进行数据处理,实现高精度尺寸测量。利用FPGA进行硬件描述实 现线阵CCD的驱 动,对CCD的输出信号进行差分放大,采用硬件滤波方法消除曝光积分和转移过程中的电子 学噪声,采用10 位模数转换器实现数字量的并行输出,FPGA内部FIFO存储数字量结果。系统充分利用FPGA 的可编程资源, 有效降低了硬件设计复杂度,无需上位机或者ARM,节约成本,系统小型化便携化。实验表明, 该系统有效克服 光源及电子学噪声影响,可对1mm-29 mm的中型尺寸物体进行测量 ,误差小于2μm。

    Abstract:

    The existing size measurement methods have low accuracy and time-cons uming and laborious measurement.In order to improve the accuracy of dimension measurement,make the measurement system porta ble and easy to operate,a precise dimension measurement system based on linear CCD is realized in this paper.A new method o f subdivision of pixels is proposed in this paper.By staggering two linear CCDs with 8um pixel spacing equally and placing them obli quely at 60degrees,it can break through the limitation of pixel spacing on measurement accuracy and reduce the maximum measu rement error to 2μm.On this basis,the floating threshold method is used for data processing to achieve high-precision size mea surement.The drive of linear CCD is realized by hardware description in FPGA,the output signal of CCD is amplified differently, the electronic noise in the process of exposure integration and transfer is eliminated by hardware filtering method,the paralle l output of digital quantity is realized by 10-bit analog-to-digital converter,and the digital result is stored in FIFO in FPGA. The system makes full use of the programmable resources of the FPGA,effectively reduces the complexity of hardware design,does not nee d the upper computer or ARM,saves costs,and makes the system miniaturized and portable.Experiments show that the system can effec tively overcome the influence of light source and electronic noise.It can measure medium-sized objects of 1mm-29mm,and the err or is less than 2μm.

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卢佳宝,韩学辉,王彩霞.基于线阵CCD的精密尺寸测量系统[J].光电子激光,2019,30(9):935~940

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  • 收稿日期:2019-03-12
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  • 在线发布日期: 2019-10-23
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