基于法布里-珀罗低相干干涉的绝对距离测量系统
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(北京交通大学 理学院光电信息科学与工程实验室,北京 100044)

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谢芳(1966-),女,重庆人,博士,主要从事光学干涉精密 测量及光纤传感方面的研究.

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北京市自然科学基金(3172024)资助项目 (北京交通大学 理学院光电信息科学与工程实验室,北京 100044)


Quick absolute distance measurement system based on low-coherence Fabry-Perot interferometry
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(Optical Science and Technology Laboratory,Department of Physics,School of Sci ence,Beijing Jiaotong University,Beijing,100044)

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    摘要:

    提出了一种基于光纤法布里-珀罗低相干干涉的 绝对距离测量系统,不仅能对绝对距离进行测 量,而且还能对温度、压力、应力等量进行绝对测量。系统利用闪耀光栅将来自法布里-珀 罗干涉仪的低相 干干涉信号进行散射,使不同波长的干涉信号由线阵CCD 不同的像元探测。利用CCD探测到 的干涉信号 相邻波谷的波数差得到法布里-珀罗干涉仪的腔长,从而实现绝对距离测量。与其它低相干 干涉测量系统相 比,此系统无需扫描干涉仪的光程,一次成像即实现测量。测量系统简单,测量速度快,对 静态物理量和 动态物理量都能进行测量。系统的光纤结构使得它还能进行远程测量。实验结果表明系统对 绝对距离测量的分辨率可达3.317 nm,10次重 复测量的标准差为10.7 nm。

    Abstract:

    A quick absolute distance measurement system,which also has great pot ential application to temperature,pressure,and strain measurements,is proposed in this paper.Compa red to most available low-coherence interferometric systems that have been used to conduct absolute m easurements,this system does not require scanning of the optical path difference during the measu rement,and is designed with easily available and inexpensive optical elements to provide a feasible mul tipurpose method applicable to industries.The optical fiber configuration endows itself with rem ote sensing ability.Based on dispersing the low-coherence interferometric signal from an optical fiber Fa bry-Perot (F-P) interferometer,the system needs only one frame captured by a linear array charg e-coupled device (CCD) rather than scanning the OPD to measure the absolute cavity length of the F-P i nterferometer.Therefore, it can perform absolute and quick measurements while being free from environment al disturbances. Parameters that have a linear relationship with cavity length,such as displacem ent,temperature, pressure,and strain,can also be measured by this system under conditions that improve the F-P interferometer structure.The sensing head can be very small so as to be embedde d in remote and harsh environments.Experimental results for absolute distance show that the measureme nt resolution can be as high as 3.317nm and the standard deviation of 10repeated measurements is 10.7nm.

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王韵致,谢芳,王辉,韩飞.基于法布里-珀罗低相干干涉的绝对距离测量系统[J].光电子激光,2019,30(7):731~736

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  • 收稿日期:2019-01-02
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  • 在线发布日期: 2019-08-30
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