Abstract:TiO2films were deposited employing electron beam evaporation te chnique on fused silica and Si substrates and silver nanoparticles with different thicknesses were deposi ted on TiO2films surface by thermal evaporation technique.The effect of Ag thickness on the structural,morpholog ical,optical and photocatalytic properties of the nanocomposite thin films was investigated,and these properties were obtained by UV-Vis spectrophotometer,X-ray diffraction (XRD),scanning electronmicroscopy (SEM),respectively.The composition and content of elements were determined by energy dispersive spectrometer.The photocatalytic performanc es of the as-synthesized Ag- TiO2were evaluated in terms of their photodegradation rate of methyl orange ( MO) in an aqueous solution under light.The results show that the Ag nanoparticles are well dispersed on porous Ti O2surface.The as-prepared Ag- decorated porous TiO2films exhibits excellent photocatalytic properties.The r esults indicate that the as- deposited Ag-TiO2thin films are amorphous.It indicates that photocatalytic activity of the samples is enhanced with the thickness of Ag increased until reach to 3.7nm.The Ag-TiO 2films show an enhanced photocatalytic activity compared with pure TiO2fil ms.