Abstract:The tree branch Mach-Zehnder interference (MZI) structure 1×32thermo-optic switch array with compact size is proposed and fabricated successfully in this paper.In this work ,the polymer switches were fabricated using the traditional micro-fabrication techniques,including spinning coating, ultra-violet (UV) curing, contact lithography,reactive iron etching (RIE),vacuum evaporating,standard c utting and polish process. By choosing etching parameters and introducing a thin isolating layer between wa veguides and a mask of aluminum,the roughness of the waveguide surface and sidewall is greatly red uced.The fabricated 1×2thermo-optic switch shows insertion loss of 2.84dB, crosstalk of -31.13dB at an applied heating power of 4.1mW.The fabricated 1×32switch array shows insertion loss of 11.8dB,crosstalk of -25.3dB with heating power no more than 5mW.The response time of the switch is 1.15ms .The measured results are in accordance with the numerical simulation.These switche s could be used in optical cross connect (OXC) system,optical add/drop multiplexer (OADM),an d in optica lly controlled phased arrayed antenna systems for beam steering.