基于纯相位液晶空间光调制器的共焦三维扫描方法研究
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(哈尔滨工业大学 超精密光电仪器工程研究所,黑龙江 哈尔滨 150080)

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邹丽敏(1974-),女,黑龙江人,博士,教 授,主要从事共焦显微探测技术、超分辨技术与纳米测量技术的研究.

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国家自然科学基金资助项目(51075084)、黑龙江省自然基金(E201423)和测控技术与仪器黑龙江省高校重点实验室开放课题资助项目 (哈尔滨工业大学超精密光电仪器工程研究所,黑龙江哈尔滨 150080)


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(Institute of Ultra-precision Optoelectronic Instrument Engineering,Harbin Inst itute of Technology,Harbin 150001,China)

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    摘要:

    针对传统的机械式共焦扫描方法由于受机械 特性或驱动技术的限制难以满足材料内部物理过程检测、缓慢化学反应可视化和活体 细胞成像等应用领域的需求,深入研究了基于纯相位液晶空间光调制器(LCSLM)的聚焦光斑 三维位置控制技术,利用LCSLM对入射光进行相位与振幅的同时调制,设计了无机械运动部 件 的三维共焦扫描系统,实现了显微物镜聚焦光斑的 三维扫描。研究结果表明,利用LCSLM能够 实现最大横向偏转角度为0.021 rad,光束偏转的绝对误差 |θerror|<3.30×10-8 rad≈1.89× 10-6,且能够实现轴向[-55.6mm,55.6mm]的扫描范围。

    Abstract:

    Confocal microscopy has been widely used in biomedicine,materials sc ience,industrial testing and other areas for its unique optical sectioning property,high lateral resolution performance and nondestructive detection.Since confocal microscopy takes lateral detection poin t by point,which can only get the information at one spot a time,3D scanning becomes necessary in th e process of confocal measurement.The traditional methods of confocal scanning are mechanical means,o f which the characteristics or mechanical driving technology limitations could not meet the requirements of live cell imaging and other application areas.Aiming at the shortcomings of mechanical sc anning methods,the technology of controlling the three-dimensional position of focusing spot based on phase-only liquid crystal spatial light modulator (LCSLM) is researched,the confocal three-dimens ional scanning system with no mechanical moving parts is designed,and the three-dimensional scanning of m icroscope objectives of focusing spot is realized.The main method is the modulation of the incident light on the phase and amplitude with liquid crystal spatial light modulator.The results prove that the scanning method can be achieved and the max- imum deflection angle is 0.021 rad,absolute error of beam de flection is |θerror|<3.30×10-8 rad≈ 1.89× 10-6,and the axial scanning range that can be realized is ,[-55.6mm,55.6mm].

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邹丽敏,庞明姝,周梦姣,王宝凯,谭久彬.基于纯相位液晶空间光调制器的共焦三维扫描方法研究[J].光电子激光,2014,(12):2329~2335

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  • 收稿日期:2014-08-08
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  • 在线发布日期: 2015-01-08
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