Vibration measurement plays an important role in micro mechanical system and fi ne processing technology.However,there are some problems in the existing measuring methods o f vibration.A vibration measuring method based on one dimensional position sensitive detector (PSD) is put forwar d in this paper.The vibration signals of the object are converted to the position of the light chan ges through laser trian gulation . The current signals with phase difference which are output from the two electrod es of PSD are converted to a direct current voltage signal which is linear with the location of facula thro ugh the signal processing circuit of PSD phase method to determine the change of facula location,and then the vibration of objects is measured.Real- time signal is measured and displayed through the oscilloscope or it is handled and displayed in the personal computer interface.The average relative error of the e xperimental frequency measurement in this work is 0.89%,the maximum error is 1.75%,and the linearity is better than 1.2%, which realize the vibration measurement with high accuracy,high linearity and immunit y to electromagnetic interference.It is able to meet the requirements of industrial non -contact measurement.