远程高速激光外差信号的高灵敏度探测器研究
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杨宏兴(1982-),男,河北,博士,讲师,主要从事大尺寸 激光测距技术的研究.

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国家自然科学基金青年基金(51205091,51105114)、中央高校基本科研业务费专项资金资 助(HIT.NSRIF.2015009)和中国博士后科学基金(2013M531026)资助项目 (1.哈尔滨工业大学超精密光电仪器工程研究所,黑龙江哈尔滨 150080; 2.哈尔滨工业大学光学工程博士后流动站,黑龙江哈尔滨 150080)


Research on high sensitivity remote high-speed detectors for laser heterodyne s ignals
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    摘要:

    针对多轴、高速和超精密激光干涉测量系统对光 电接收器在探测灵敏度、响应带宽和稳定性等方面的特殊需求,提 出一种基于远程探测的高带宽激光外差信号探测方法。首先,针对多轴激光干涉测量中多个 传统光电接收器热耗散大、严重 影响测量精度的问题,设计远程光纤探头,将光接收与光电信号处理部分完全分开,彻底消 除光电接收器热耗散对测量系统 的影响;其次,针对单光轴光功率微弱、难以探测和稳定性差的问题,设计具有主动温度漂 移特点的APD高压反向偏置电 源,在提高光电接收器探测灵敏度的同时增强其温度稳定性;设计的光电探测器能够实 现远程光耦合传输,耦合效率能 达到38%以上,最大探测灵敏度为0.52μW, 测量带宽可达17.5MHz,满足多轴、高速超精密激光干涉测量系统对光电接收器的性能需求。

    Abstract:

    According to the requirements of the multi-axis,high speed,ultra-p recision heterodyne interferometer,a high bandwidth laser heterodyne signal detecting method based on remote detection is proposed i n this paper.First,a remote fiber sensor is designed to reduce the thermal dissipation of the conventional receivers in multi-axis l aser heterodyne interferometers.With the remote probe design,the light receiving module is separated from the detection circuits,whic h can completely eliminate the effect of the receiver heat dissipation.Second,an optical detector APD with temperature compensation for high voltage power supply is designed to solve the problem of difficult detecting of the weak light power in each ax is of a multi-axis measurement system.Based on this design,high sensitivity and high stability photoelectric conversion can be achieved.According to the above theory analysis and key technology research,a high sensitivity and high stability remote laser heterody ne interference signal detector is integrated and arresponding experiments have been done in the laboratory environment.Experimental results ve rify that the new photoelectric detector can realize 38% coupling efficiency and above,0.52μW detection sensitivity,and 17.5MHz me asurement response bandwidth.With the improvement in the above performance,the detector can meet the requirements of the h igh-speed multi-axis laser heterodyne measuring systems.

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胡鹏程,杨宏兴,梅健挺.远程高速激光外差信号的高灵敏度探测器研究[J].光电子激光,2014,(5):925~931

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  • 收稿日期:2013-09-20
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