基于CMOS工艺的双层非制冷热敏电阻型红外探测器
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申宁(1986-),男,辽宁大连人,博士研究生,主要从事 低成本非制冷红外探测器和MEMS工艺的研究.

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国家自然科学基金(61131004,6)资助项目 (大连理工大学 电子科学与技术学院,辽宁 大连 116023)


A double-layer uncooled thermistor infrared detector based on standard CMOS technology
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    摘要:

    采用0.5μm标准CMOS工艺 和微机械加工工艺,设计并制作了低成本双层非制冷热敏电阻型红 外探测器。探测器采用隐藏桥腿式微桥结构,使用表面牺牲层技术实现,其中包括Al、W和 Si 3种牺 牲层材料。CMOS工艺加工完成后,双层微桥结构的微机械加工过程只需进 行湿法腐蚀 即可,成本较低。对双层红外探测器的热性能和光电特性进行测试,其热导为1.96×10 -5 W/K,热容为 2.23×10-8 J/K,热时间常数为1.14 ms。当红外辐射调制频率为10 Hz时,双层红 外探测器的电压响应率为2.54×104V/W,探测率为1.6×108cm·Hz1/2/W。

    Abstract:

    This paper develops a low-cost double-layer uncooled thermistor infrared detector based on standard 0.5μm CMOS technology and micromachining proces ses.The double-layer infrared detector employs a hidden-bridge-leg micro-bridge structure with a 55μm×55μm bridge deck,two 7.5μm width hidden bridge legs and an aluminum thermistor.The micro-bridge structure is im plemented by the surface sacrificial layer technology without any additional lithography or thin film de position procedure.The sacrificial layers include three materials: aluminum,tungsten and polysilicon.The double- layer infrared detector has a size of 65μm×65μm and a fill factor of 71.6%.The temperature coefficient of resista nce (TCR) of the aluminum thermistor is about 0.419%/K in a muffle furnace whose temperature varies from 10℃ to 100℃.The thermal conductance of the double-layer infrared detector is calculated as 1.96×10-5 W/K by measuring responses to different heating currents from 0.3mA to 4.8mA.The fabricated infrared detecto r is irradiated by an infrared laser which is modulated by a mechanical chopper in a frequency range of 10-1000Hz.Measurements show that the thermal time constant is 1.14ms and the thermal mass is 2.23×10-8 J/K.The respo nsivity of the infrared detector is about 2.54×104V/W at 10Hz and the calculated detectivity is 1.6×108cmHz1/ 2/W.

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申宁,余隽,黄正兴,唐祯安.基于CMOS工艺的双层非制冷热敏电阻型红外探测器[J].光电子激光,2014,(5):845~850

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  • 收稿日期:2013-10-29
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