基于数字全息干涉的微振动区域多点同步实时测量
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肖文(1962-),男,陕西西安人,博士,教授 ,主要从事数字全息干涉检测以及光电技术在空间的应用研究.

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国家自然科学基金(61177006)资助项目 (北京航空航天大学 仪器科学与光电工程学院,北京 100191)


Real-time micro-vibration multi-spot synchronous measurement within a region based on digital holographic interferometry
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    摘要:

    为满足工程应用中对物体微振动进行区域多点同 步实时测量的需求,基于数字 全息干涉理论提出一种微振动区 域多点同步实时测量方法,构建了一套微振动多点同步测量系统。通过对高速采集的全息图 进行局部解算,采用快速振幅解算 算法,从全息图中实时提取振动表面的振动信息,实现了在较高频率下对物体表面进行nm 量级的微振动区域多点实时测量。 通过测量经高精度多普勒振动测量仪校准后的耳机振膜振动情况,对系统进行了实验验证 。实验结果表明,系统能够实时获取 物体表面的微振动信息,可同时提取任意点进行同步实时振动测量,在100~2400Hz频段内测量精度较高,平均误差为3.7%,测量区域内各点测量精度相同。

    Abstract:

    Real-time micro-vibration measurement is widely used in engineering applications.It is very difficult for traditional optical detection methods to achieve real-time need in a relatively high frequency and multi-spot synchronous measurement of a region at the same time,especially at the nanoscale.Based on digital holographic interferometry t heories,a method of real-time micro-vibration multi-spot synchronous measurement of a region is proposed to satisfy the demand in enginee ring applications.A corresponding measuring system is built according to this approach.The high speed acquired holograms are localy c a lculated.Vibration information of the region can be extracted directly and instantaneously from the holograms by using a fast demodulation alg orithm.By this way,the measuring range is enlarged remarkably.The proposed method can achieve real-time need in a relatively high frequency and multi-spot synchronous measurement of a region at the same time.The feasibility of the system is demonstrated by measur ing the vibration of a headset diaphragm calibrated by the high precision Doppler vibration measuring instrument.The results demonstrate that t he system is feasible,when the frequency range of the vibration is between 100Hz and 2400Hz.The measurement error is 3.7% on average and every point in the measurement region has the same accuracy.

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张兆海,肖文,潘锋,丛琳,张鑫.基于数字全息干涉的微振动区域多点同步实时测量[J].光电子激光,2013,(11):2174~2179

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  • 收稿日期:2013-05-02
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