基于小孔阵列的并行激光共焦显微检测技术研究
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余锦(1971-),男,博士,博士生导师,主要从事半导体 激光泵浦的全固态激光技术与应用、脉冲与超短脉冲激光技术、非线性光学频率变换技术以 及光学测量等方面的研究工作.

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Research on parallel laser confocal microscopy based on a pinhole array
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    摘要:

    为了对微纳加工工件进行三维形貌测量,建立了 基于小孔阵列的并行激光共聚焦显微检测系统。利用自行研发的三波长皮秒脉冲激光 加工机在面积为1cm2的铜箔上制备100×100的小孔阵列,以实现 并行分光,小孔的平 均直径为43.6μm,间距为100μm。利用小 孔阵列系统,分别对镀 膜平板和螺钉进行了三维测量。实验结果表明,在轴向平移台步距为1μm的条件下,本文 系统能对待测样品 实现轴向分辨率为1μm、横向分辨率为20μm的三维扫描并重构出 样品形貌。本文共焦显微检测方法能大大提 高共焦扫描速度,能很好满足一般工业检测需求,本文为并行共焦探测技术提供了一条新 的研究和运用方法。

    Abstract:

    In order to measure workpiece′s micro-nano three-dimensional topogr aphy,this paper sets up a parallel confocal microscopy detection system based on the pinhole array.Firstly,in order to rea lize the beam splitting in parallel,a pinhole array of 100×100in the copper foil is made by the laboratory′s three-wavelength picos e cond pulse laser processing machine,and the pinhole array′s area is a square centimeter,the average diameter of the pinhole is 43. 6μm,and the spacing between holes is 100μm.Then the Fraunhofer diffraction model of the pinhole array is studied.Secondly,the thre e-dimensional image reconstruction algorithm and laser speckle homogenization are analyzed.Finally,the measuring system makes three-d imensional measurement for coating plate and screw respectively.The experimental results show that the axial resolution of 1μm a nd the lateral resolution of 20μm are attained and the three dimensional reconstruction image is obtained under the condition that the stepping motor moves 1μm per step.This parallel confocal microscopy system greatly improves the three-dimensional testing speed and can satisfactorily meet the general industrial testing requirement.This paper provides a new method of research and applicatio n for parallel confocal detection technology.

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涂龙,余锦,樊仲维,王志昊,黄科,葛文琦,聂树真,郭广妍,王昊成.基于小孔阵列的并行激光共焦显微检测技术研究[J].光电子激光,2013,(10):1989~1994

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  • 收稿日期:2013-03-05
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