ZnO nanostructures were successfully grown on Au/Al-doped ZnO (AZO) f ilm/quartz substrates by thermal evaporation of Zn powders.In order to investigat e the effect of post-annealed substrate on the growth of ZnO nanostructure,Au/AZO/quartz subst rates were annealed at 300℃,500℃,and 700℃ in vacuum,respectively.The surfa ce morphologies of substrates were observed by atomic force microscopy (AFM).The microstructure,mor phologies,and optical properties of ZnO nanostructures were studied by X-ray diffraction (XRD ),scanning electron microscopy (SEM),transmission electron microscope (TEM),and fluorescence spectro photometer,respectively. The results show that high-density ZnO nanorods were grown on the as-deposi ted and annealed substrate at 300℃,while nanoparticles were observed on the substrates anneal ed at 500℃ and 700℃.The average diameters of the nanorods with single-crystalline structur e are about 50nm and 80nm.The grown mechanism of nanorods is vapor-liquid-solid (VLS) mechanis m.Room temperature photoluminescence (PL) spectra show that the PL spectra of al l samples have a UV emission peak and a broad deep-level emission peak.Moreover,as the annealing temperature in creases,the intensity of UV emission enhances and the intensity of deep-level e mission declines.