复杂形貌亚波长阵列的周期长度测量研究
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陶卫东(1969-),男,浙江宁波人,博士,教 授,硕士生导师,主要从事光学与光电子学的研究.

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国家自然科学基金(61078060)资助项目 , 董建峰2, 陈宝钦3(1.宁波大学 理学院,浙江 宁波 315211; 2.宁波大学 信息科学与工程学院,浙江 宁波 315211; 3.中国科学院微电子研究所,北京 100029)


Study on the period length measurement of complex morphology sub-wavelength periodic-arrays based on diffraction optical method
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    摘要:

    设计并建立了一套基于光纤光谱仪的光学测试系 统,将由电子束光刻技术制备的一组 具有手征结构形貌的二维周期阵列结构作为样品,其由扫描电镜(SEM)测量得到的周期长度 分别约为520、570nm。测试并研究了二 维手征周期结构在白光垂直入射条件下光谱随衍射角的变化规律,以及将衍射光学方法用于 复杂形貌的亚波长二维阵列的周期长度测量效果。结果表明,随着衍射角增加,所有样品的 衍射波长均向 长波偏移;在同一衍射角下,样品的衍射波长与其周期结构具有对应关系。利用正交光栅 衍射方程,模 拟了白光在垂直入射条件下的衍射光谱变化,以此推算样品的周期尺寸与SEM测得的数据相 差小于3%,获得了良好的效果,表明了一般正交光栅衍射方程在复杂形 貌结构中的适用性。

    Abstract:

    An optical test system based on the optical fiber spectrum analyzer is designed and established.A series of two-dimensional periodic-arrays samples with chiral m orphology are fabricated by electron-beam lithography technology.The periods of samples are measured by scanning electro microscope (SEM),which are 520nm,570nm,and 790nm respective ly.On condition that the incident light is pe rpendicular to the surface of the sample,the change rule of the spectrum with diffractio n angle under the white light is tested and analyzed firstly.Meanwhile,the measurement effect on the c ycle length of complex morphology two-dimensional periodic-arrays is tested by diffraction optical me thod.The results indicate that the diffraction spectra of all samples will gradually move to long wavelen gth when the diffraction angle increases.And on the same diffraction angle,there is a relationship be tween the diffraction wavelength and the period length of the sample.Through the derived cross-grati ng diffraction equation, the diffraction spectral change of the sample under the normal incidence is si mulated.The result is satisfied well,which indicates the applicability of cross-grating diffraction e quation in complex morphology structure.Thus the period lengths of the samples are calculated,and we get that the deviation of the results from the observations of SEM is less than 3%.

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张斌,徐荣祥,王培卿,潘雪丰,陶卫东,董建峰,陈宝钦.复杂形貌亚波长阵列的周期长度测量研究[J].光电子激光,2013,(9):1758~1762

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  • 收稿日期:2012-12-24
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