双激光位移传感器组合测头的光轴共线调校法
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刘新波(1985-),男,湖南邵东人,博士研究生,主要从事非 接触式机械制造检测技术的研究.

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国家科技重大专项项目(2009ZX04014-092)和高等学校博士学科点专项科研基金(20090032110048)资助项目 (天津大学 精密测试技术及仪器国家重点实验室,天津 300072)


Optic axis collinear adjustment method for the double laser displacement sensors combination probe
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    摘要:

    针对大型工件内尺寸高精度在机测量难题,介 绍了一种双激光位移传感器组合定值比较测头, 其功能可类比一把非接触式“内径千分尺”,能实现快速、无损、高精度和自动化测量。测 头在使用前,需 保持两束激光的光轴重合,而分立的激光束是否满足这种位姿关系一般难以确定。针对此问 题,分析 了光轴位姿误差对检测精度的影响,给出了允差值,提出了一种激光光轴共线性测量、调整 方法。分别利用已调校和未调校的测头对标准量块进行测量,证明了调校方案切实可行。

    Abstract:

    This paper presents a non-contact probe with two laser displacement s ensors for measuring the inner dimension of the large workpieces on machine.The probe′s function can be analogized to a non-contact internal micrometer which has the ability to make the measuring program fast,non-destructive,precise and easily automatic.Before utilizing the probe to measure the inner dimension,it should be guaranteed that the optical axes of two lasers in the probe coincide.However,it′s generally difficult to ensure the discrete la sers meet the demand in practice.To solve the problem,this paper analyzes the influence of t he probe′ optic pose error on the detection precision,and gives the tolerance value through com puting the terminal data.At the same time,we design the corresponding laser optical coaxi al measurement and adjustment method based on the machine vision and a novel position transform .Finally,using the regulated and unregulated probes respectively to measure some standard gauge blocks,the results prove that the measurement and adjustment method is feasible,and the di fference between the measured value by the regulated probe and the standard value of the gauge is just 4μm.

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刘新波,付鲁华,王仲,兰太吉.双激光位移传感器组合测头的光轴共线调校法[J].光电子激光,2013,(7):1363~1369

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  • 收稿日期:2012-12-16
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