Al组分对GaAs/AlxGa1-xAs 量子阱红外探测器峰值响应波长的修饰
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胡小英(1978-),女,陕西大荔人,博士研究生,讲师,研究 方向为光电子技术.

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国家总装部共性技术支撑项目(4040503104)、教育厅项目(12Jk0980)、国家自然科学基金(50975288)和西安市创新计划(CXY1007-3)资助项目 (1.西安电子科技大学 微电子学院,陕西 西安 710071; 2.西安工业大学 光电工程学院, 陕西 西安 710032)


Modification for peak wavelength of GaAs/AlxGa1-xAs quantum well infrared photodetector by Al content
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    摘要:

    为了确定量子阱红外探测器(QWIP)峰值响应波长与 势垒中Al组分的关系,建立微观结构表征与宏观特性的关系, 设计不同组分含量的实验样品,对样品进行相应的测试,分析探讨了Al组分与理论峰值波长 的关系。利用金属有机 物化学气相沉积(MOCVD)生长GaAs/AlxGa1-xAs量子阱材料,分别制备出势垒中Al组分为0.23、0.32的1#、2#样品。用傅里叶光谱仪分别对其进行77K液氮温度下 响应光谱测试及室温光致 荧光(PL)测试。响应光谱结果显示,1#、2#样品峰值响应波长分别为8.36、7.58μm,与由薛定谔 方程计算得到的峰值波长9.672、7.928μm 的误差分别为15.6%、4.6%。利用高分辩透射扫描电镜(HRTEM)对样 品进行分析发现,GaAs与AlGaAs 晶格的不匹配及量子阱材料生长过程精度控制不够是造成1#样品误差较大的主要原因,说明 势垒中Al组分x减小致 使量子阱中的子带间距离逐渐缩小,导致峰值响应波长红移。PL实验结果与理 论计算相符合,说明改变势垒中Al组分x可实现QWIP峰值波长的 微调。

    Abstract:

    In order to determine the relatoinship between the Al content and the peak wavelength of quantum well infrared photodetector (QWIP).and establish another one between charact erization of microstructure and macroscopic properties of samples.The author designed two device-samples with different Al content based on the bound to the quasi bound state transitions (b-qbQWIP) modle.Corresponding tests h ave been done,including photoresponse spectra,photoluminescence spectra and hig h resolution transmission electron microscopy (HRTEM).The relation between Al conte nt and the peak wavelength is analyzed and discussed in theory.Two sample-devices of GaAs/AlxGa 1-xAs quantum well infrared photodetec tors have been made by using metal organic chemical vapor deposition (MOCVD).Al content of 1# sample is 0.23while that of 2# one is 0.32.The photoresponse spectra are obtained at 77K by using Fou rier transform spectrometer while photolumi nescence spectra are tested at room temperature for two sample-devices of GaAs/AlxGa1-xAs quantum well infrared ph otodetectors.The peak wavelengths of 1# and 2# are 8.36μm and 7.58μm from photoresponse spectra,wh ile the ones are 9.672μm and 7.928μm according to Schrodinger equation.The main reason for 1# error much larger is crystal lattice mismatch between GaAs and AlGaAs and not precise controlling dur ing growth of quantum well material after the crystal structure is investigated by using high-resolutio n transmission electron microscope (HRTEM).It shows that reducing Al content will lead to subband narrowed and peak wavelength red-shift .Photoluminescence results are consistent with Schrodinger equation.

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胡小英,刘卫国,周顺,陈智利. Al组分对GaAs/AlxGa1-xAs 量子阱红外探测器峰值响应波长的修饰[J].光电子激光,2013,(4):649~654

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  • 收稿日期:2012-10-22
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