In this paper,the CMOS-compatible micro solar cell arrays with chip-scale designed in standard CMOS process are presented,which will receive solar energy from the environment and supply the UHF radio-frequency-identification(RFID) tag.The solar cell test chip is implemented by SMIC 0.18 μm CMOS technology with approximately 0.2 mm2 active area.The maximum output power obtained at AM 1.5,1 000 W/m2 and 25 ℃ is 10.212 μW,and the short-circuit current and open-circuit voltage are 28.763 μA and 0.458 V,respectively.The photoelectric conversion efficiency is 5.106%.In contrast to the complex manufacture processes for conventional solar cell,the CMOS solar cell is compatible with standard CMOS technology and can be integrated on the same chip to supply energy for the system.