基于频域变换的两平晶互检求解算法
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TH74

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Two-flat test solutions based on frequency domain transform
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    摘要:

    提出了一种平面绝对检验的频域面形恢复算法。算法基于两平晶互检方法,对其中一个被测面增加不同旋转角度的测量。通过频域求解算法,可以恢复出被测面的三维绝对面形分布。该数值处理重建算法利用快速傅里叶变换(FFT)和线性滤波处理测量数据。将本文算法结果同传统Zernike多项式拟合算法结果进行了对比,结果吻合较好。3个面的最大PV(peak to valley)值偏差为0.027λ,最大RMS(root mean square)值偏差为0.003λ。实验结果表明,本文算法即使在高空间分辨率的情况下,误差传递也较低,同时计算效率较高。

    Abstract:

    As a high-precision testing method for optical flat,the surface solution algorithm is very important.A method for reconstruction surfaces map in frequency domain is presented.It is based on the two-flat test,combined with additional measurements of one test piece in different rotational positions.The 3D absolute distributions of surfaces are determined with this method.The numerical reconstruction algorithm employs fast fourier transform(FFT) and linear filtering to deal with the measurement data.The results are compared with classic Zernike reduction method,and they are matched well.The maximum difference of peak to valley(PV) and root mean square(RMS) between two methods are 0.027λ and 0.003λ,respectively.The experiment shows that this algorithm has low error propagation,even in the case of high spatial resolution and it is computationally efficient.

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孙文卿,陈磊,何勇,朱日宏.基于频域变换的两平晶互检求解算法[J].光电子激光,2012,(3):542~546

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