Vanadium oxide(VOx) thin films were prepared on silicon substrates by the direct current facing targets magnetron sputtering,and these films have optical switching performance in terahertz(THz) band.The X-ray photoelectron spectroscopy and scanning electronic microscopy(SEM) were used to measure the component and investigate the morphology of VOx thin films.In addition,the photo-induced phase transition properties of VOx were tested by the THz time-domain spectroscopy system(TDS).In the experime...