In order to study the influence of the deposition temperature on stress and optical properties of HfO2 films,we fabricated HfO2 thin films using electron beam evaporation method under different deposition temperatures.We used ZGYO interferometer,UV3101-PC spectrophoto-meter,X-ray diffraction instrument and emission scanning electron microscopy to test the samples.The experimental results show that the HfO2 films are amorphous at selected deposition temperatures,and the residual stress and intrin...