AlxZn1-xO(AZO)alloy thin films were deposited on Si substrates by RF magnetron sputtering,and photodetectors were fabricated on these AZO thin films by using Ni/Au as contact metal,forming a metal-semiconductormetal(MSM) structure with interdigital(IDT) configuration.Optical transmission spectra tested by a UV-Vis-Nir spectrometer indicate that the absorption edge has obvious blue shift with Al concent increasing.I-V characteristics,time response and spectra response of the detectors were investigated.With ...