White light vertical scanning interferometry has grown to be a standard measurement method for the MEMS industry.However,due to the limits of the objective′s field of view and the phase-shifting range in the test system,it can not perform large scope transverse testing.In this paper,a white light tilt scanning interferometry was presented to expand the lateral measuring range and improve the testing efficiency.The experimental system was set up based on nano-measuring machine(NMM).During the til...