A rf magnetron sputtering system was used to deposit lithium niobate(LiNbO3) film on Si(111) substrate.The effects of substrate temperature,the annealing temperature and the sputtering gas pressure on the crystallization and the surface morphology of thin films were investigated by X-ray diffraction(XRD) and scanning electron microscopy(SEM).The film thickness and refractive index was also measured by an ellipsometry.The results show that the XRD peak of LiNbO3 phase is not present at 450 ℃ subs...