Diamond-like carbon films are fabricated respectively on glass substrates and Si(100) substrates in low temperature by Magnetoactive-Radio Frequency-Plasma Enhanced Chemical Vapor Deposition(M-RF-PECVD) method.The film characteristics are investigated by using Fourier transform infrared(FTIR) spectroscopy,Raman spectroscopy and scanning electron microscope(SEM),respectively.The results show that hydrogenated carbon films prepared at power of 50 W,pressure of 30 Pa,and CH4/Ar ratio of 5/90,have a smooth surf...