After inductively coupled plasma etching using Indium Tin oxide(ITO) particles as mask,we manufactured red-light-emitting diode(LED) that surface roughened and investigated the effect of etching duration to ITO on LED surface morphology.The results showed that under the inject current of 20 mA,the light extraction efficiency of surface roughened LED increased by at least 30% when the diameter of the formed GaP particles was around 200～500 nm and the etching depth is 200～400 nm.In addition,surfac...