White light interferometry has become an important method in micro-structure characterization to perform high precision,fast and non-contact measurements.However,with the limit of the field of view of the objective,the large scale measurement can only be achieved by image stitching.In general case,the image stitching will apply overlapping for the collected images,and the superposed image will also introduce noise.In this paper,a new method based on the nano-measuring machine(NMM) and the white light interf...