To overcome the shortcomings of limited range and low measurement speed in current scanning probe microscope(SPM),a large range scanning microscope for fast,high accurate and traceable nano measurement and metrology is proposed,which combines the fast optical confocal microscope and SPM.A large range nano-positioning system used as scanning stage in this microscope is implemented,which consists of two stages:a coarse stage driven by servo motors in two dimensions and a flexible-hinge fine stage driven by PZ...