The amorphous silicon-hydrogenated(a-Si:H) films with sandwich-structure are fabricated by PECVD method.The transmission infrared spectra(TIR) for the films annealed at different conditions show that the bonds of the films will be changed at higher annealed temperature(600 ℃) and longer annealed time,which leads to the hydrogen release,thus the sandwich structure of the films is broken.By improving the anneal technique and film structure,the films with complete sandwich structure are obtained at...