In order to improve the surface precision of multi-electrode electrostatic stretching membrane mirrors,the stretching formation and surface shape error of a membrane at uniform load are studied based on the Henky-Campbell equilibrium equations of circular membrane.The first order optimization method of ANSYS software is used to build an optimization model of membrane mirror surface shape,in which the yield strength is the state variable,the surface load on three concentric annular regions of the mirror is t...