The resonance frequency method based on micro laser Doppler(MicroLD)was used to measure residual stress of nanobeam.The vibration PDE of fixed-fixed beam with axial force was set up,and the unique solution was obtained.Then the calculation method of optimization or numerical iteration method was brought forward according to the stress status of the measured structures,and the FEM modal analysis was used for the validation of the above calculation results.Finally,the SiC-W double-layer fixed-fixed nanobeam r...