new three-dimensional micromachining manner of overlapped increment scanning of electron beam is adopted,and exposure experiments are made by universal electron beam exposure systems. After development, the distinct threedimensional microstmctures are obtained and can be used as the master of elastic stamps which are the key of soft lithography,so elastic stamps can be fabricated after sitanization. Then,these elastic stamps can be used to replicate micropattems with relevant technology of SL. The results of exposure experiments show that overlapped increment scanning manner of electron beam can be applied to fabricating the motherboards of micro-3D elastic stamps.