Abstract:The dynamic response error of position senstive detector(PSD) changes with the different scanning situations.When a light source scans and irradiates the surface of PSD,based on the dynamic response model of one-dimensional PSD,a mathematical model of dynamic response error of PSD was established and the simulation was done.The five distribution characteristics of dynamic response error were obtained by analyzing the impact of different start positions and scanning speeds on it.Thereby,the estimation model of dynamic response error was given.Finally,the correctness of the model was validated by the simulation of four typical PSDs.