Abstract:The inspection of chip pin location is a necessary step in chip aspect measurement.With the development of chip,there are more and more pins on each chip,and the width of each pin becomes narrower.It is impossible to deal with the measurement using the traditional methods.A measurement method for it based on multiple resolution analysis(MRA) calculation is proposed in this paper,that distinguish the micro shifts of the pins according to the coefficient of MRA.The method has the merit of fast speed,high precision and high reliability.The experiment result is given.