基于不同色散模型的TiO2薄膜的椭偏光谱分析
Ellipsometric analysis of TiO2 thin films based on different dispersion models
投稿时间:2022-12-02  修订日期:2023-03-09
DOI:
中文关键词:  光谱学、光学常数、椭偏光谱、色散模型
英文关键词:spectroscopy, optical constant, spectroscopic ellipsometry, dispersion model
基金项目:国家自然科学基金资助项目(11104160)
作者单位邮编
王梦茹* 曲阜师范大学 273165
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中文摘要:
      溶胶-凝胶法制备的TiO2薄膜通常具有一定的孔隙率,椭偏光谱是分析含孔隙薄膜光学常数的有效方法之一,但色散模型的选取直接影响薄膜椭偏光谱的拟合结果。用溶胶-凝胶法在单晶硅基底上制备了TiO2薄膜,分别采用了Cauchy Absorbent、Sellmeier Absorbent、New-Amorphous、Tauc-Lorentz、Adachi-New Forouhi五种色散模型对TiO2薄膜在1.55-4 eV波长范围的椭偏光谱进行拟合分析,并利用斜入射下的反射谱对各模型的拟合结果进行验证。结果表明New-Amorphous、Tauc-Lorentz、Adachi-New Forouhi模型均适用于溶胶-凝胶法TiO2薄膜在整个测试波段上的椭偏光谱拟合,而Cauchy Absorbent、Sellmeier Absorbent模型无法在整个测试波段得到较好的椭偏光谱拟合,适用波段较窄。该研究结果为含孔隙的溶胶-凝胶TiO2薄膜的椭偏光谱分析提供了色散模型选择参考。
英文摘要:
      TiO2 films prepared by sol-gel method usually have certain porosity, and the ellipsometer spectrum is one of the effective methods to analyze the optical constants of films with pores, but the selection of dispersion model directly affects the fitting results of the ellipsometer spectrum.TiO2 thin film was prepared on monocrystalline silicon substrate by sol-gel method. It adopts Cauchy Absorbent, Sellmeier Absorbent, New-Amorphous, Tauc-Lorentz and Adachi-New Forouhi respectively five dispersion models to fit the ellipsoid spectra of TiO2 films in the wavelength range of 1.55 -4 eV, and the reflection spectra at oblique incidence were used to verify the fitting results of each model.The results show that the New-Amorphous, Tauc-Lorentz and Adachi-New Forouhi model are suitable for the spectral fitting of sol-gel TiO2 film in the whole test band. However, the Cauchy Absorbent and Sellmeier Absorbent models are not suitable for the fitting of the whole band and can only be applied to the limited band. The results provide a reference for the selection of dispersion model for the ellipsometric analysis of sol-gel TiO2 films containing pores.
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