基于SOI的并联耦合双微环谐振器的反射特性研究
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1.山西省能源互联网研究院;2.太原理工大学 集成电路学院;3.山西省六维人工智能生物医学研究院;4.重庆信息通信研究院

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TN256

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国家自然科学基金(61971301,62031022,51975400)、山西省科技厅地方科技发展基金(YDZJSX2021A018)


Theoretical Research on Reflection Characteristics of Parallel-Coupled Dual-Microring Resonator Based on SOI
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1.Shanxi Energy Internet Research Institute;2.College of Integrated Circuits, Taiyuan University of Technology;3.Shanxi Research Institute of 6D Artificial Intelligence Biomedical Science;4.Chongqing Academy of Information and Communications Technology

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    摘要:

    针对目前集成电路和光学器件向微型化、集成化的发展趋势,以及构建大规模光电一体化集成系统的现实需求,提出了一种并联耦合双微环谐振器结构。采用时域有限差分(Finite Difference Time Domain, FDTD)方法,分析了模型的关键几何参数(环心距(Center-To-Center, CTC)、间隙宽度和波导折射率的变化)对反射谱中耦合诱导透明效应(Coupled Resonator Induced Transparency, CRIT)的起源和特性的影响。由于波导周围包层部分折射率的微小变化会引起反射谱的红移,该模型可作为折射率(Refractive Index, RI)传感器,其灵敏度为223.3 nm/RIU(折射率单位),是单环模型灵敏度的2.8倍。

    Abstract:

    With the miniaturization and integration trend of the integrated circuit and optical devices, and the realistic requirement of building large-scale photoelectric integrated system, a parallel-coupled dual-microring resonator configuration is designed. The method of finite difference time domain (Finite Difference Time Domain, FDTD) was employed to analyze the impact of key geometry parameters (the center-to-center (Center-To-Center, CTC) distance, the gap width and the change of waveguide refractive index) of the model on the origin and characteristics of coupled-resonator-induced transparency effect (Coupled Resonator Induced Transparency, CRIT) in the reflection spectrum. As the red shift of the reflectance spectra induced by the slight refractive index (RI) change of cladding part, this model can be used as a RI sensor with the sensitivity of 223.3 nm/RIU (refractive index unit), which is 2.8 times as high as the value of the single ring model.

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  • 收稿日期:2025-05-09
  • 最后修改日期:2025-07-31
  • 录用日期:2025-08-13
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