光栅成像系统线性关系的表征技术研究
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西安工业大学

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O436

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科技部项目基金


Research on Characterization Techniques of the Linear Relationship in Grating Imaging Systems
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Xi’an Technological University

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Project Fund of the Ministry of Science and Technology

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    摘要:

    本文提出了一种使用表观传递函数表征正弦振幅光栅成像系统线性关系的方法,用于研究部分相干光照明光栅成像系统的线性关系。建立光栅成像系统空间域数学模型,利用MATLAB软件进行模拟仿真,仿真结果表明,随着成像系统相干性越接近于完全非相干成像系统,其表观传递函数在光栅归一化固有频率范围内越接近于线性。设计并搭建实验平台,使用7种不同线对数的光栅进行研究,分别研究成像系统在三种不同相干度条件下一次谐波分量和二次谐波分量的线性关系,实验结果表明,光栅成像系统越接近于完全非相干成像系统,其表观传递函数越接近线性,与理论结果相吻合。

    Abstract:

    This paper proposes a method for characterizing the linear relationship of sine amplitude grating imaging systems using the apparent transfer function, with the aim of investigating the linear response of grating imaging systems under partially coherent illumination. A spatial-domain mathematical model of the grating imaging system is established, and MATLAB is adopted for simulation. The simulation results indicate that the apparent transfer function of the imaging system approaches linearity within the normalized intrinsic frequency range of the grating as the system's coherence approaches that of a fully incoherent imaging system. An experimental platform was designed and constructed to investigate the linear relationship of the first-order and second-order harmonic components of the imaging system under three different coherence conditions, using seven gratings with different line pairs. The experimental results demonstrate that the apparent transfer function of the grating imaging system approaches linearity as the system becomes closer to a fully incoherent imaging system, which is in good agreement with the theoretical results.

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  • 收稿日期:2025-04-24
  • 最后修改日期:2025-07-16
  • 录用日期:2025-08-13
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