| 胡义慧,江超,孙四梅,刘继兵.毛细石英管构成的高灵敏度光纤气压传感器[J].光电子激光,2018,29(1):39~43 |
| 毛细石英管构成的高灵敏度光纤气压传感器 |
| High sensitivity capillary structure optical fiber gas pressure sensor |
| 投稿时间：2017-05-02 |
| DOI： |
| 中文关键词: 气压传感器 毛细石英管 飞秒激光 微孔结构 |
| 英文关键词:gas pressure sensor capillary quartz tube femtosecond laser micro-pore struc ture |
| 基金项目:湖北省自然基金(2014CFB349、2016CFC742)和湖北师范大学2015年优秀创新团队(T 201502)资助项目 (湖北师范大学 物理与电子科学学院,湖北 黄石 435002) |
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| 中文摘要: |
| 为实现高精度的气压测量,提出一种利用飞秒激 光微加工技术与光纤熔接技术制作的法布里- 珀罗(FP)干涉仪(FPI)型光纤气压传感器。利用波长800nm的飞秒 激光脉冲在毛细石英管侧壁上加工一微孔, 利用光纤熔接技术把毛细石英管熔接在一段单模光纤(SMF)和一段多模光纤(MMF)之间,制备 出一种光纤气压传 感器。通过改变传感器的FP腔内气压大小,导致FP腔内气体折射率改变,从而引起传感器 的透射 谱线性漂移,通过计算气压变化量与透射谱的谐振峰波长漂移量之间的关系就能够实现传感 器的气 压测量。理论分析了传感器实现气压测量的机理,实验测量了传感器的灵敏度。实验结 果表明, 传感器对周围气压变化的响应较大,透射谱的谐振峰波长随气压线性变化的灵敏度达到4.22nm/Mpa,而传感器对环境温度变化的响应很小,减少了温度对气压 测量的交叉感染。 |
| 英文摘要: |
| In order to achieve high precision gas pressure measurement,an optica l fiber Fabry-Perot interferometer (FPI) gas pressure sensor is proposed by femtosecond laser microm achining technique and optical fiber splicing technique.A micro hole is fabricated on a capillary quar tz tube by femtosecond laser pulses with a wavelength of 800nm.The capillary quartz tube is connected betwe en a segment of single-mode fiber (SMF) and a segment of multimode fiber (MMF) by optical fiber splicing technique to prepare an optical fiber gas pressure sensor.By changing the gas pressure in FP cavity of the sensor,the refractive index of the gas in FP cavity will change,and the transmission spectr um will shift linearly.The pressure change in the cavity is observed by a barometer,and the sensitivity of the sensor is calculated by changing the relation between the variation of the barometric pressure and the w avelength shift.The operation mechanism of capillary pore structure for gas pressure measurement is analyzed theoretically. The sensitivity of the sensor is measured by the change of ambient gas pressure and temperature.The experimental results show that the ambient pressure and temperature have influen ce on the sensor head,and the pressure sensitivity is 4.22nm/Mpa.The temperature sensitivity is far less t han the pressure sensitivity,so the design sensor can eliminate the cross-sensitivity of ambient temperature an d gas pressure. |
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