钱莉荣,戴玮,李翠平,徐晟,杨保和.纳米金刚石膜的成核及生长特性研究[J].光电子激光,2015,26(4):700~706 |
纳米金刚石膜的成核及生长特性研究 |
Nucleation and growth characteristics of nanocrystalline diamond films |
投稿时间:2014-09-28 |
DOI: |
中文关键词: 纳米金刚石(NCD)膜 二甲基亚砜(DMSO) 纳米金刚石粉体 分散性 成核密度 |
英文关键词:nanocrystalline diamond (NCD) film dimethyl sulphoxide (DMSO) nanodiamond powd er dispersibility nucleation density |
基金项目:国家高技术研究发展计划(863)(2013AA030801)、国家自然科学基金(61401306,5)、天津市自然科学基金(13JCZDJC36000)资助项目 (1.天津大学 精密仪器与光电子工程学院,天津 300072; 2.天津理工大学 电子信息工程 学院天津市薄膜电子与通信器件重点实验室,天津 300384) |
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中文摘要: |
采用直流等离子体喷射化学气相沉积(DC arc pla sma jet)系统制备了纳米金刚石膜(NCD),研究了不同的金刚石成核剂溶液对NCD 膜的成核及生长的影响。研究表明,在成核剂溶液中添加二甲基亚砜(DMSO)后成核密度明显 得到提高,而 且制备的NCD膜晶粒分布均匀、致密。当金刚石粉体作为成核剂时,随着其粒径 的增大,NCD膜成核密度下降,晶粒的尺寸均匀性也变差,而粒径为5nm的金刚石纳米粒 子作为成核剂时,NCD膜晶粒间结合致密、颗粒分布均匀。最后,选择5nm的金刚石纳米 粒子和丙酮/DMSO配制的分散液作为成核剂配方,经过60min的生长 ,制备了粒径为50~70 nm的结晶性和品质良好的NCD膜,适用于高频声表面波(SAW)器件及各种光学窗口的研制。 |
英文摘要: |
In this study,the nanocrystalline diamond (NCD) films were prepared b y a DC arc plasma jet chemical vapor deposition (CVD) system. Nucleation and growth of the NCD films highly depend on the pretreatment process for substrates.The effects of diamond particles in different solvent systems on the nucleation of n anocrystalline diamond films are analyzed.The nucleation density of the NCD films decreases with the in creasing size of the diamond particles in the solvent systems.The solvent system contains dimethyl sulfoxide (DMSO) and us ing it to pretreat substrates can enhance nucleation density,and crystal nucleus becomes smaller and more intense.Final ly,the NCD films were grown for 60min after pretreatment in a mixed solution of acetone and dimethyl sulfoxide containing 5nm diamond nanoparticles.The films consist of diamond nanocrystals with 50-70nm diameter, and with good crystalline quality. The NCD films are suitable for the high-frequency surface acoustic wave devices and various optical windows. |
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