| 周娟,恽斌峰,胡国华,崔一平.三阶聚合物波导布拉格光栅的设计与制备[J].光电子激光,2014,(11):2095~2099 |
| 三阶聚合物波导布拉格光栅的设计与制备 |
| Design and fabrication of the third-order polymer waveguide Bragg grating |
| 投稿时间：2014-07-03 |
| DOI： |
| 中文关键词: 聚合物 波导布拉格光栅(WBG) 三阶光栅 |
| 英文关键词:polymer waveguide Bragg grating (WBG) third-order grating |
| 基金项目: |
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| 摘要点击次数: 1962 |
| 全文下载次数: 189 |
| 中文摘要: |
| 利用紫外固化聚合物材料ZPU46和ZPU44分别作为 芯层和包层材料,设计并制备了中心波长在 1550nm附近的三阶聚合物波导布拉格光栅(WBG )滤波器。采用接触式光刻和反应离子刻蚀(RIE)等传统微加工工艺, 在高为4μm的单模矩形波导表面制备周期为1.6μm、高为 680nm的皱褶型光栅结构。实验测得截面 尺寸为4μm×4.2μm和5μm×4.2μm) 的三阶聚合物WBG的谐振波长分 别为1549550.5nm,边模抑制比分别为 19dB,3dB带宽分别为0.4nm和0.6nm,插入损耗为－7d B,与理论设计结果符合较好。 |
| 英文摘要: |
| Optical grating filters in guided-wave optics have been extensively investigated,because they are essential for applications in wavelength division multiplexing systems. When surface-relief gratings are inscribed on waveguides,the grating-waveguides can act as filters to select particular signals from many arriving signals.By using ultraviolet curable materials ZPU46and ZPU44as the core and cladding materials,a third-order polymer waveguide Bragg grating filter wi th the center wavelength near 1550nm is designed and fabricated.A surface grating wi th a period of 1.6μm and height of 680nm is fabricated on single mode rectangular waveguides with 4μm thickness by trad itional contact lithography and reactive ion etching.Experimental results show that with the wa veguide cross section size of 4μm×4.2μm (5μm×4.2μm),the center wavelength of the fabricate d third-order polymer waveguide grating is 1549nm (1550.5nm),side mode r ejection ratio is 19dB (18dB),3dB bandwidth is 0.4nm (0.6nm),and the insertion loss is 7dB.The measurement results are consistent with the simulation results very well. |
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