| 王夏菁,郑佩祥,李超,徐启峰.一种基于位置敏感器相位检测的振动测量方法[J].光电子激光,2014,(9):1765~1770 |
| 一种基于位置敏感器相位检测的振动测量方法 |
| A vibration measuring method based on phase detection by position sensitive detector |
| 投稿时间：2014-04-21 |
| DOI： |
| 中文关键词: 一维位置敏感器(PSD) 光学三角法 相位检测法 振动测量 |
| 英文关键词:one-dimensional position sensitive detector (PSD) optical triangle method pha se detection vibration measurement |
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| 中文摘要: |
| 针对微机械系统和精细加工技术中现有的振动测量 方法存在易受电磁干 扰、动态和线性范围窄等诸多问题,本文提出了一种基于一维位置敏感器(PSD )相位检测的振动测量方法,通过激光三角法将 被测 物体的振动信号转换为光斑在 PSD 的位置变化, PSD 两电极输出的电 流相差信号经 PSD 相位法的信号处理电路转换为与光斑位置成线性关系的直流电压 信号 ,由此确定光斑的位置变化,进而 测量物体的振动,且 实时信号可以通过示波器或在上位机界面中显示。本 文实验测量的平均相对误差为 0.89% ,最大误差为 1.75% ,线性度优于 1.2% ,实现了振动的高精度、高线性度 和不受电磁干扰的测量。 |
| 英文摘要: |
| Vibration measurement plays an important role in micro mechanical system and fi ne processing technology.However,there are some problems in the existing measuring methods o f vibration.A vibration measuring method based on one dimensional position sensitive detector (PSD) is put forwar d in this paper.The vibration signals of the object are converted to the position of the light chan ges through laser trian gulation . The current signals with phase difference which are output from the two electrod es of PSD are converted to a direct current voltage signal which is linear with the location of facula thro ugh the signal processing circuit of PSD phase method to determine the change of facula location,and then the vibration of objects is measured.Real- time signal is measured and displayed through the oscilloscope or it is handled and displayed in the personal computer interface.The average relative error of the e xperimental frequency measurement in this work is 0.89%,the maximum error is 1.75%,and the linearity is better than 1.2%, which realize the vibration measurement with high accuracy,high linearity and immunit y to electromagnetic interference.It is able to meet the requirements of industrial non -contact measurement. |
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