| 刘锦景,刘道亚,董建峰,张斌,何如双,陶卫东,陈宝钦.平面手征结构的旋光度精密测量[J].光电子激光,2014,(9):1732~1735 |
| 平面手征结构的旋光度精密测量 |
| Study on precise measurement of the optical activity of plane chiral structure |
| 投稿时间：2014-05-20 |
| DOI： |
| 中文关键词: 平面手征结构 旋光性 电子束光刻 |
| 英文关键词:planar chiral structure optical activity electron beam lithography |
| 基金项目:国家自然科学基金(61078060)、宁波市光电材料与器件创新团队(2009B21007)、 宁波大学优秀学位论文培育基金(PY2013012)、宁波大学研究生科研创新基金(G14064) 资助项目 (1.宁波大学 信息科学与工程学院,宁波 315211； 2.宁波大学 理学院微电子科学与工程系,宁波 315211； 3.中国科学院微电子研究所,北京 100029) |
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| 中文摘要: |
| 基于精密步进电机和光纤光谱仪的光学测试系统,优化设计了一种精确测量手征结构样品旋 光度的方案。对手征样品旋光性的理论分析结果表明,由于周期性手征结构样品 制作过 程中90°旋转对称性被打破,线偏振光经过样品后偏振面旋转角度与入射光的 偏振面角度有关。实验测量结果直接证明了理论分析的正确性。利用设计的光学测试系统对 采用电子束光刻技术制作的周期性平面手征结构样品进行旋 光度测量的结果表明,样品在波长为633 nm处具有0.05°的旋光度,很 好证明了研制的周期性平面手征结构具有一定的旋光性。 |
| 英文摘要: |
| An optimal design experimental method that can accurately measure the optical activity of the periodic planar chiral structure sample is proposed.This me thod is based on an optical test system mainly consisting a precise stepping motor and a fiber optical spectrometer.In addition,the optical activity of the periodic planar chiral st ructure is performed through detailed deduction of the formula and theoretical analysis.Th e analysis results reveal that when the linearly polarized light transmits through the peri odic planar chiral structure the polarization azimuth rotation angle is a functi on of the polarization angle of the incident light,since the 90°-rotation symmetry is broken caused by the random errors of manufacture.Experimental results exactly demonstrate the validity of theory anal ysis.The optical activity of the periodic planar chiral structure sample fabricated by el ectron beam lithography technology is measured by the designed optical test system.The expe rimental results show that the periodic planar chiral sample possesses the optical activi ty of 0.05° at the wavelength of 633nm.As a consequence,the optical activity of the fabricated c hiral structure is well demonstrated. |
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