杨丁,尹伊.Si基Sr1.8Ca0.2NaNb5O15薄膜的合成及光学特性研究[J].光电子激光,2014,(7):1355~1362 |
Si基Sr1.8Ca0.2NaNb5O15薄膜的合成及光学特性研究 |
Preparation and optical properties of Sr1.8Ca0.2NaNb5O15 thin film on the silicon substrate |
投稿时间:2014-01-08 |
DOI: |
中文关键词: Sr1.8Ca0.2NaNb5O15(SCNN) 铁电薄膜 择优取向 溶胶-凝 胶法 单纯形法 |
英文关键词:Sr1.8Ca0.2NaNb5O15 (SCNN) ferroelectric thin film preferre d orientation sol-gel method simplex method |
基金项目:中央高校基本科研业务费(ZYGX2012J059)和四川省教育厅重点项目(12ZA283)资助项目 (1.四川职业技术学院 机械工程系,四川 遂宁 629000; 2.电子科技大学 光电信息学院, 四川 成都 610054) |
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中文摘要: |
利用溶胶-凝胶法,在Si(001)单晶衬底上逐层 生长四方钨青铜结构的Sr1.8Ca0.2NaNb5O15(SCNN)薄膜。利用X射 线衍射(XRD)仪、扫描电子显微镜(SEM)和原子力显微镜(AFM)等技术研究了薄膜 的微结构,结果表明,SCNN 薄膜在厚度较小的状态下可呈现出明显的(001)择优取向,而随着厚度的增加择优取向 受到抑制,颗粒 尺寸增大,薄膜的多晶态的趋势增强。然后通过测量薄膜在400~780nm光谱范围内的反射 率曲线,采用 Sellmeier色散公式分析折射率非均匀性的影响,通过改进的单纯形法计算拟合出SCNN薄 膜的折射率和厚度,其中厚度的结果利用SEM加以验证,而折射率的变化则 与薄膜结晶态的变化保持一致。 |
英文摘要: |
Tetragonal tungsten-bronze structure Sr1.8Ca0.2NaNb5O15 (SC NN) thin films have been grown on Si(001) single crystal substrates via sol-gel and layer-by-layer annealing method.The crystallinity,surface morphology and cross-sectional microstructure of thin films are investigated by X-ray di ffraction (XRD),atomic force microscopy (AFM) and scanning electron microscopy (SEM),respectively.The resul ts indicate that the highly (001)-oriented SCNN thin films are successfully obtained with low thicknesses (about 150nm,less than 10spinning layers).However,with the increase of film thickness (about 300nm,mor e than 20spinning layers),the trend of polycrystallinity of SCNN film is stren gthened and its preferred (001) orientation is also restrained.The competi tion of homogeneous nucleation insid e the films and heterogeneous nucleation at the substrate interfaces is suggested to account for the change of crystallinity of SCNN films with increasing thickness.The improved simplex method is utilized to determine the refractive indices and thickness of SCNN films by fitting the measured reflectance curves with visi ble reflection spectrophotometer in the wavelength range of 400-780nm.The Sellmeier equation is selected as dispersion model and the double-layer film system model is constructed by considering the refractive i nhomogeneity (as an interfacial layer).The results suggest a great agreement between the measured and calcula ted reflectance curves.The fitting results of film thicknesses are also proved by the SEM patterns.The variation of refractive index keeps consistent with that of crystallinity of SCNN thin films with increasing thickne sses. |
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