| 杨兰天,金贻.纳秒脉冲激光器制备的Si表面宽带抗反射杂化结构[J].光电子激光,2014,(7):1344~1349 |
| 纳秒脉冲激光器制备的Si表面宽带抗反射杂化结构 |
| Hybrid microstructures on Si surface formed by nanosecond pulse laser for broadband antireflection |
| 投稿时间：2014-02-19 |
| DOI： |
| 中文关键词: 杂化 激光 宽带 抗反射 |
| 英文关键词:hybrid laser broadband antireflection |
| 基金项目:国家留学基金委(201208525017)资助项目 (贵阳学院 电子与通信工程学院,贵州 贵阳 550005) |
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| 中文摘要: |
| 提出了一种通过纳秒脉冲激光器微加工制作的杂 化准微金字塔型结构,与未经处理的均匀 准微金字塔型结构相比,平均反射率下降了15％。通过实验,系统研 究了激光能量密度、 脉冲个数和图案间距对反射性能的影响。结果表明,反射率随图案间距的增加而增加,随着 脉冲数增加 而减少,当激光能量密度在4.83J/cm2时获得最小反射。 这种技 术用具有普通纵横比的微 杂化结构替代高纵横比的非杂化结构,获得宽带抗反射性能,成本更低。通过优化激光加工 参数能获得较高的抗反射性能。 |
| 英文摘要: |
| In order to reduce the average reflectance of broadband antireflection surfaces,a hybrid quasi-micro-pyramid structure is fabricated via nanosecond pulse laser micro-processing,which demonstrates a 15% drop in average reflectance as compared with the uniform quasi-micro-pyramid structures.The effects of laser fluence,pulse nu mber and designed pitch are also studied experimentally and systematically.The results s how that the reflection increases with the pattern pitch,decreases with pulse number ,and a minimum in reflection is achieved at a laser fluence of 4.83J/cm2.A hybrid st ructure is fabricated by nanosecond pulse laser with multiple scanning,which demonstra tes a lower reflection with a decrease of 7% and 35% in average and peak reflectances compared with its corresponding uniform structures.The demonstrated method provides an alternative and low-cost solution for broadband anti-reflection by hybrid stru ctures with normal aspect ratio rather than uniform structures with high aspect ratio. Higher antireflection performance can be expected by optimizing the laser processing parameters. |
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