| 高洪生,王真真,解意洋,耿照新,阚强,王春霞,袁浚,陈弘达.金纳米颗粒增强富硅氮化硅发光特性的研究[J].光电子激光,2014,(7):1338~1343 |
| 金纳米颗粒增强富硅氮化硅发光特性的研究 |
| Study on the enhancement of light emission from silicon-rich silicon nitride by gold nanoparticles |
| 投稿时间：2013-11-14 |
| DOI： |
| 中文关键词: 局域表面等离子共振(LSPR) Au纳米颗粒 富硅氮化硅 光致发光(PL) |
| 英文关键词:localized surface plasmon resonance (LSPR) Au nanoparticles silicon-rich silicon nitride photoluminescence (PL) |
| 基金项目:国家重点基础研究计划“973”(2010CB934104,2011CBA00608)、国家高技术研究发展计划“863”项目(2013AA013602,2013AA031903)、国家重点基金项目(61036009,60736037)和国家自然科基金(61378058,61036002,61178051)资助项目 (1.中国科学院半导体研究所,北京 100083; 2.中央民族大学 信息工程学院,北京 100081) |
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| 中文摘要: |
| 采用时域有限差分(FDTD)方法,对Au纳米颗粒的 尺寸和形貌对于其光学特性的影响进行了系统的理论 研究。通过采用等离子体增强化学气相沉积(PECVD)、晶化处理、电子束蒸发和高温退火 等工艺,制备基于局域表面等离子共振(LSPR)效应的富硅氮化硅发光 芯片。利用拉曼光谱仪、扫描电 子显微镜(SEM)、奥林巴斯显微镜等对不同结构Au纳米颗粒富硅氮化硅发光器件的特性 进行了表征。研究表 明,通过对Au纳米颗粒的大小、形状和分布合理优化,富硅氮化硅芯片的发光强度在570nm波长附近提升了7倍,增强峰的位置红移了10nm。 |
| 英文摘要: |
| Localized surface plasmon resonance (LSPR) effect of gold nanoparticles could b e used to enhance the photoluminescence properties of silicon-rich silicon nitride (SRSN).The size a nd morphology of gold nanoparticles have significant influence on the light-emitting properties of t he devices.In this paper,the finite-difference time-domain (FDTD) method is applied to investigate the opt ical properties of gold nanoparticles with different sizes and morphologies.The size of gold nanopartic le only affects the LSPR strength, while the morphology affects both the LSPR wavelength and intensity.When the pa rticles become flat,the LSPR wavelength presents red shift and the LSPR becomes stronger.The LSPR based gold nanoparticles were fabricated on the surface of SRSN film.Raman spectroscopy,scanning electron microscopy (SEM) and O LYMPUS microscopy are employed to study the optical properties of SRSN light emitting devices with gold nanoparticles wi th varied size,shape and distribution. The results show that the photoluminescence intensity of SRNS light emitting dev ices could be enhanced by 7times at the wavelength of 570nm by optimizing the size,shape and distribution of gold nanoparticles.Meanwhile,the position of the enhancement peak has a 10nm red shift. |
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